Monitors

IMM-100

Making Excellence Repeatable

IMM-100

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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Protect and Grow Your Profit with Precision Rate and Thickness Monitoring

IMM-100 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.

With the oscillator built-in IMM-100 can be easily integrated into an EtherCAT system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.

Features

  • INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Maximize yield with the best QCM thickness measurement possible
  • Single channel rate and thickness monitor without unnecessary added features to minimize cost
  • ±0.0035 Hz over 100 ms sample
  • EtherCAT communications for seamless integration
  • Compact size to minimize integration costs by saving tool real estate
  • Expert application support, able to discuss unique application needs and give greater support than the competition
  • RoHS compliant

Typical Applications

  • OLED Applications

Specifications

Sensor inputs1
Measurement frequency range6.0 to 4.5 MHz (fixed)
Rate and thickness resolution0.0042 Å (new crystal); 0.0076 Å (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0
Communication typeEtherCAT, 2 RJ45 jacks, supports data daisy chaining. Explicit device ID via switches
Part Number
Accessories
Consumables
Part NumberDescription
785-600-G1IMM-100 Thin Film Deposition Monitor
Part NumberDescription
  
Optional Power SuppliesThe power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum.
961-021-G1Power Supply Kit 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
961-021-G7Power Supply Kit IL 240V
961-021-G8Power Supply Kit IL 4.5 M Extension
961-021-G9Power Supply Kit IL 9.0 M Extension
961-021-G10Power Supply Kit UK 240V
961-021-G11Power Supply Kit UK 4.5 M Extension
961-021-G12Power Supply Kit UK 9.0 M Extension
  
Optional Mounting Bracket 
785-202-G1Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet
785-201-G1Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet
  
Optional Communications Cable 
600-1190-P1ETHERNET COMUNICATION CABLE 1 METER
600-1190-P2SPEC- ETHERNET COMMUNICATION CABLE .3M
600-1190-P4ETHERNET COMUNICATION CABLES 4.3 METER
600-1190-P8Ethernet 7m cable
600-1190-P15Ethernet 15m cable
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